Products and services

Comprehensive Solutions for SEZ Wet Etch Equipment

We understand the needs of the semiconductor industry to provide our customers with high-quality solutions and guarantee sustainable customer support.

Refurbishment

Spin Processor

Highest flexibility in terms of customer requirements, lead-time, cost, efficiency, product configuration and sustainability

Equipment including chemical dispense systems (all SEZ / Lam SP products)
Modules (Elevating- Speed units, Robot, PCC, CCC, ECOs, Process Chambers, Chucks…)
Components (e.g. Motors, PCBs, PC Mainboards,…)

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Spare Parts

OEM Parts

Reliable source to ensure spare parts
availablity and individual delivery times

supporting all SEZ / Lam products
100% availability for SEZ SP Series and Chemical Dispense Systems
parts available as new, used, refurbished and tested

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AI-generated image for illustrative purposes only

Repair & Exchange Service

REX Service

Providing highest flexibility in terms of lead-time, cost- efficiency and sustainability for spare parts procurement process

support all SEZ / Lam Spin Processor OEM parts from assembly to component level
reduce equipment downtime and enhance product lifecycle
strengthening spare parts availability

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Support & Consulting

Technical Support

We support all challenges and ensure that our customers receive effective solutions immediately, while improving the operational readiness, reliability, and performance of the equipment.

tool down interventions / troubleshooting
installed base harmonization
process support
customized equipment / component training
individual solutions, e.g, SiC wafer detection, thin wafer handling, etc.

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Installation & Relocation

Commission Your Equipment

RGML Technologies provides

professional installation / relocation of equipment
equipment setup and start-up accorrding OEM and safety guidelines
support for production release

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